Exergy - The ideal choice for compact design and unequaled thermal performance... The ideal choice for compact design
and unequaled thermal performance...

SemiConductor Case Study

SEMICONDUCTOR ...high purity for Cleanrooms

Semiconductor High Purity For Cleanrooms
Major Customers
  • Applied Materials
  • ASML
  • Intel
  • Varian
  • SAES Pure Gas
  • Entegris
Typical Applications
  • Temperature control
  • Processing equipment
  • Orbital welded to tube stub fittings

Customer Application (Case Study) Leading lithography manufacturer requires their equipment to be controlled to a very specific temperature to maximize the performance of the machine. Using multiple Exergy heat exchangers, connected to a chiller, a large amount of water is cooled to a very specific temperature, +/- 0.1 deg. C, and pumped throughout the machine to maintain a steady temperature.

Solution
  • Model # 00486-03
  • All 316L Stainless Steel
  • 6.7 ft2 transfer area in
    2.5" dia shell 20" long
Semiconductor
Semiconductor
Features & Benefits
  • Tube stub fittings for orbital welding
  • Customized special fittings
  • Cleaned and bagged for Cleanroom use
  • High pressure rating
  • Compact design
  • Precise temp control
Heat Exchanger
Heat Exchanger

Example of heat exchanger
orbitally welded in.