SemiConductor Case Study
SEMICONDUCTOR ...high purity for Cleanrooms
- Applied Materials
- ASML
- Intel
- Varian
- SAES Pure Gas
- Entegris
- Temperature control
- Processing equipment
- Orbital welded to tube stub fittings
Customer Application (Case Story) Leading lithography manufacturer requires their equipment to be controlled to a very specific temperature to maximize the performance of the machine. Using multiple Exergy heat exchangers, connected to a chiller, a large amount of water is cooled to a very specific temperature, +/- 0.1 deg. C, and pumped throughout the machine to maintain a steady temperature.
- Model # 00486-03
- All 316L Stainless Steel
- 6.7 ft2 transfer area in
2.5" dia shell 20" long
Semiconductor
- Tube stub fittings for orbital welding
- Customized special fittings
- Cleaned and bagged for Cleanroom use
- High pressure rating
- Compact design
- Precise temp control
Heat Exchanger
Example of heat exchanger
orbitally welded in.