SemiConductor
Exergy heat exchangers are ideally suited for semiconductor applications. Manufactured in all 316L Stainless Steel and used in a wide range of temperatures and pressures.
Major Customers
- Applied Materials
- ASML
- Entegris
- Intel
- LAM
- SAES Pure Gas
- Varian
Typical Applications
- Fine temperature control
- Processing equipment
- High purity for cleanrooms
- Lithography tools
- Gas purifiers
- Integrated fittings
Features & Benefits
- Tube stub fittings for orbital welding
- Customized special fittings
- Cleaned and bagged for Cleanroom use
- High pressure rating
- Compact design
- Precise temp control
Case Study Examples
SC #1006 Fine Temperature Control
SC #1011 Hot Water Cooled by Water
SC# 1059 Cooling Deionized Water
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